Height profile measurement by means of white-light interferometry

Abstract eng:
White-light interferometer allows to measure the height profile of smooth as well as of rough surfaces. This feature renders white-light interferometry suitable for height profile measurement in technical practice. Unlike to classical interferometry, the ambiguity problem does not occur, even if the measurement range is greater than that corresponding to one interference fringe. Due to this unambiguity, the measurement range is theoretically unlimited; in practice it amounts to 20 - 50 mm. A very low measurement uncertainty (of about 1 um) is independent on the measurement range. The height profile is measured in the course of one measurement procedure on a surface area that amounts to 20 × 20 mm.

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