000003928 001__ 3928
000003928 005__ 20141118153341.0
000003928 04107 $$acze
000003928 046__ $$k2009-05-11
000003928 100__ $$aKuběna, I.
000003928 24500 $$aDetermination of mechanical properties of thin films by nanocompression

000003928 24630 $$n15.$$pEngineering Mechanics 2009
000003928 260__ $$bInstitute of Theoretical and Applied Mechanics AS CR, v.v.i., Prague
000003928 506__ $$arestricted
000003928 520__ $$2eng$$aMeasurements of mechanical properties of objects with micrometric (or even smaller) dimensions is still not a common task. In this paper, the possibility of evaluation basic mechanical properties of a thin film by nanocompression is demonstrated. Cylindrical specimens with the axis normal to the film plane, attached by the bottom to the substrate, are prepared by the focused ion beam technique. Such pillars are deformed by a nanoindenter outfitted by a flat diamond punch. An equivalent of compression curve is obtained. It is possible to measure directly parameters as the yield stress, stress at a chosen strain level or work hardening rate. Finite elements modelling is necessary for the Young modulus evaluation. It is shown that the Young modulus can be evaluated quite precisely, even if the geometry of the pillar is not perfect.

000003928 540__ $$aText je chráněný podle autorského zákona č. 121/2000 Sb.
000003928 653__ $$a

000003928 7112_ $$aEngineering Mechanics 2009$$cSvratka (CZ)$$d2009-05-11 / 2009-05-14$$gEM2009
000003928 720__ $$aKuběna, I.$$iKruml, T.$$iNáhlík, L.$$iHutař, P.
000003928 8560_ $$ffischerc@itam.cas.cz
000003928 8564_ $$s798261$$uhttp://invenio.itam.cas.cz/record/3928/files/Kruml-191-PT.pdf$$y
             Original version of the author's contribution as presented on CD, 191.
            
000003928 962__ $$r3852
000003928 980__ $$aPAPER