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The Institute of Theoretical and Applied Mechanics
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Original version of the author's contribution as presented on CD, SOL. :
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Nanocompression of oriented pillars from Al thin film
Kuběna, I.
;
Kruml, T.
In this paper, a new method of measurement of mechanical properties of thin films is presented. This method combines specimen preparation by focused ion beam (FIB) and co [...]
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