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Active-Passive Seismic Isolation System for Monocrystal Pullers
Furukawa, Hironori ; Misoka, Hideaki
This paper describes a seismic isolation system for monocrystal pullers. In a monocrystal puller, a monocrystal is suspended by a wire through an extremely narrow neck, a [...]
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1 Kamada, T.
1 Kamada, Teruo
1 Kamada, Toshiro
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