000010242 001__ 10242
000010242 005__ 20141205155706.0
000010242 04107 $$aeng
000010242 046__ $$k2008-10-12
000010242 100__ $$aHora, Hirokazu
000010242 24500 $$aFeasibility Study of Active Micro-Vibration Control System Using Piezoelectric Actuators for Floor Structure of Precision Manufacturing Facilities

000010242 24630 $$n14.$$pProceedings of the 14th World Conference on Earthquake Engineering
000010242 260__ $$b
000010242 506__ $$arestricted
000010242 520__ $$2eng$$aAs the semiconductor processing technology keeps evolving, the demand for vibration-free environment of semiconductor manufacturing facilities keeps becoming severe. We develop an active micro-vibration control system by using piezoelectric actuators to suppress the vibration of the floor in precision manufacturing facilities. The system is a smart structure that includes the actuators put on the beams of the floor, acceleration sensors and controllers. The main purpose is to suppress the vertical vibration of the floor where the machines are installed. The smart structure actuator is suitable for micro-vibration control except earthquakes for the limit of the capacity. Feasibility tests were executed by using a large-scale experimental model, which is a steel frame of two-dimensional truss to represent as the floor structure of the manufacturing facilities. The weight of the model is 1800kg and its span is 6m. The size of the piezoelectric actuator is 25 x 25 x 36mm. The test result shows that the exception vibration control performance is achieved and expresses the feasibility of the control system for the real structure.

000010242 540__ $$aText je chráněný podle autorského zákona č. 121/2000 Sb.
000010242 653__ $$aActive Vibration Control, Piezoelectric Actuator, Floor Structure

000010242 7112_ $$a14th World Conference on Earthquake Engineering$$cBejing (CN)$$d2008-10-12 / 2008-10-17$$gWCEE15
000010242 720__ $$aHora, Hirokazu$$iYasuda, Masashi$$iOsako, Tatsuya$$iNoguchi, Yasuyuki$$iKato, Hisao$$iFujita, Takafumi$$iShimazaki, Mamoru
000010242 8560_ $$ffischerc@itam.cas.cz
000010242 8564_ $$s531800$$uhttps://invenio.itam.cas.cz/record/10242/files/05-06-0027.pdf$$yOriginal version of the author's contribution as presented on CD, Paper ID: 05-06-0027.
000010242 962__ $$r9324
000010242 980__ $$aPAPER