000014992 001__ 14992 000014992 005__ 20161115100208.0 000014992 04107 $$aeng 000014992 046__ $$k2016-08-21 000014992 100__ $$aAbdel-Rahman, Eihab 000014992 24500 $$aStrange attractors observed in electrostatic MEMS actuators 000014992 24630 $$n24.$$p24th International Congress of Theoretical and Applied Mechanics - Book of Papers 000014992 260__ $$bInternational Union of Theoretical and Applied Mechanics, 2016 000014992 506__ $$arestricted 000014992 520__ $$2eng$$aWe present an electrostatic IVIEMS actuator exhibiting superharrnonic resonances as well as chaotic behaviour in soft vacuum, 500 mTorr. The displacement and velocity of the electrostatic actuator are measured with a laser vibrometer. These responses are analysed and presented in the time and frequency domains. 000014992 540__ $$aText je chráněný podle autorského zákona č. 121/2000 Sb. 000014992 653__ $$a 000014992 7112_ $$a24th International Congress of Theoretical and Applied Mechanics$$cMontreal (CA)$$d2016-08-21 / 2016-08-26$$gICTAM2016 000014992 720__ $$aAbdel-Rahman, Eihab 000014992 8560_ $$ffischerc@itam.cas.cz 000014992 8564_ $$s183281$$uhttps://invenio.itam.cas.cz/record/14992/files/TS.MS04-3.05.pdf$$yOriginal version of the author's contribution as presented on CD, page 130, code TS.MS04-3.05 . 000014992 962__ $$r13812 000014992 980__ $$aPAPER