000015003 001__ 15003
000015003 005__ 20161115100208.0
000015003 04107 $$aeng
000015003 046__ $$k2016-08-21
000015003 100__ $$aKalafut, Devin
000015003 24500 $$aMultistability of a cantilever MEMS/NEMS capacitive switch model

000015003 24630 $$n24.$$p24th International Congress of Theoretical and Applied Mechanics - Book of Papers
000015003 260__ $$bInternational Union of Theoretical and Applied Mechanics, 2016
000015003 506__ $$arestricted
000015003 520__ $$2eng$$aIn order to fully understand nonlinear dynamics of cantilever beam micro- and nanoelectromechanical capacitive switches, thorough knowledge of static behavior is vital. Presented herein is the analysis for equilibrium positions of a generalization of such devices. The representative system model employs multiphysics features based on Euler-Bernoulli beam theory, parallel plate capacitance for electrostatics, and a form of surface interaction with both attractive and repulsive regions. The geometry, material properties, and surface features of a device are condensed into just a few dimensionless quantities, creating a parameter space of low enough dimensionality to provide accessible representations of all system equilibria within physically relevant ranges. The results offer insight into the breadth of obtainable multistability as well as sensitivity to parametric uncertainty, which is crucial for informing studies on switching dynamics and various device performance metrics.

000015003 540__ $$aText je chráněný podle autorského zákona č. 121/2000 Sb.
000015003 653__ $$a

000015003 7112_ $$a24th International Congress of Theoretical and Applied Mechanics$$cMontreal (CA)$$d2016-08-21 / 2016-08-26$$gICTAM2016
000015003 720__ $$aKalafut, Devin
000015003 8560_ $$ffischerc@itam.cas.cz
000015003 8564_ $$s128307$$uhttps://invenio.itam.cas.cz/record/15003/files/TS.MS04-5.04.pdf$$yOriginal version of the author's contribution as presented on CD,  page 152, code TS.MS04-5.04
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000015003 962__ $$r13812
000015003 980__ $$aPAPER