000001508 001__ 1508
000001508 005__ 20141118153504.0
000001508 04107 $$acze
000001508 046__ $$k2003-05-12
000001508 100__ $$aPavlíček, P.
000001508 24500 $$aHeight profile measurement by means of white-light interferometry

000001508 24630 $$n9.$$pEngineering Mechanics 2003
000001508 260__ $$bInstitute of Theoretical and Applied Mechanics AS CR, Prague
000001508 506__ $$arestricted
000001508 520__ $$2eng$$aWhite-light interferometer allows to measure the height profile of smooth as well as of rough surfaces. This feature renders white-light interferometry suitable for height profile measurement in technical practice. Unlike to classical interferometry, the ambiguity problem does not occur, even if the measurement range is greater than that corresponding to one interference fringe.  Due to this unambiguity, the measurement range is theoretically unlimited; in practice it amounts to 20 - 50 mm. A very low measurement uncertainty (of about 1 um) is independent on the measurement range. The height profile is measured in the course of one measurement procedure on a surface area that amounts to 20 × 20 mm.

000001508 540__ $$aText je chráněný podle autorského zákona č. 121/2000 Sb.
000001508 653__ $$a

000001508 7112_ $$aEngineering Mechanics 2003$$cSvratka (CZ)$$d2003-05-12 / 2003-05-15$$gEM2003
000001508 720__ $$aPavlíček, P.
000001508 8560_ $$ffischerc@itam.cas.cz
000001508 8564_ $$s451430$$uhttps://invenio.itam.cas.cz/record/1508/files/242-Pavel-Pavlicek-PT.pdf$$y
             Original version of the author's contribution as presented on CD, SOL.
            
000001508 962__ $$r971
000001508 980__ $$aPAPER