000015392 001__ 15392
000015392 005__ 20161115100220.0
000015392 04107 $$aeng
000015392 046__ $$k2016-08-21
000015392 100__ $$aComi, Claudia
000015392 24500 $$aPull-in and nonlinear dynamic behavior of torsional microresonators

000015392 24630 $$n24.$$p24th International Congress of Theoretical and Applied Mechanics - Book of Papers
000015392 260__ $$bInternational Union of Theoretical and Applied Mechanics, 2016
000015392 506__ $$arestricted
000015392 520__ $$2eng$$aTorsional microresonators find application in a number of microdevices, including gyroscopes and resonant accelerometers [l], magnetometers, mass detection devices and micro-mirrors. The study of torsional resonators, also in the nonlinear regime, is therefore needed in order to properly design and test such devices. Here a static characterization of the resonator is shown together with a study of the non-linear dynamic behavior. Two analytical approximations (III and V order) of the dynamic frequency response of the torsional resonators are compared to the numerical solution of the full dynamic model and a limit domain is found in the bias voltage - actuation voltage plane.

000015392 540__ $$aText je chráněný podle autorského zákona č. 121/2000 Sb.
000015392 653__ $$a

000015392 7112_ $$a24th International Congress of Theoretical and Applied Mechanics$$cMontreal (CA)$$d2016-08-21 / 2016-08-26$$gICTAM2016
000015392 720__ $$aComi, Claudia
000015392 8560_ $$ffischerc@itam.cas.cz
000015392 8564_ $$s152977$$uhttps://invenio.itam.cas.cz/record/15392/files/TS.SM12-1.04.pdf$$yOriginal version of the author's contribution as presented on CD,  page 2611, code TS.SM12-1.04
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000015392 962__ $$r13812
000015392 980__ $$aPAPER