000015414 001__ 15414 000015414 005__ 20161115100221.0 000015414 04107 $$aeng 000015414 046__ $$k2016-08-21 000015414 100__ $$aAlneamy, Ayman 000015414 24500 $$aElectrostatic versus Electromagnetic Micromirror Actuation 000015414 24630 $$n24.$$p24th International Congress of Theoretical and Applied Mechanics - Book of Papers 000015414 260__ $$bInternational Union of Theoretical and Applied Mechanics, 2016 000015414 506__ $$arestricted 000015414 520__ $$2eng$$aThis paper compares the performance of electrostatically actuated and electromagnetically actuated micromirrors. The static and dynamic characterization of both types of micromirrors is carried out. We find that micromirrors actuated electromagnetically via a Lorentz force can realize much larger (20 times more) torsion angles than electrostatically actuated micromirrors for the same mirror structure. 000015414 540__ $$aText je chráněný podle autorského zákona č. 121/2000 Sb. 000015414 653__ $$a 000015414 7112_ $$a24th International Congress of Theoretical and Applied Mechanics$$cMontreal (CA)$$d2016-08-21 / 2016-08-26$$gICTAM2016 000015414 720__ $$aAlneamy, Ayman 000015414 8560_ $$ffischerc@itam.cas.cz 000015414 8564_ $$s79525$$uhttps://invenio.itam.cas.cz/record/15414/files/TS.SM12-5.04.pdf$$yOriginal version of the author's contribution as presented on CD, page 2654, code TS.SM12-5.04 . 000015414 962__ $$r13812 000015414 980__ $$aPAPER