000015517 001__ 15517
000015517 005__ 20161115100224.0
000015517 04107 $$aeng
000015517 046__ $$k2016-08-21
000015517 100__ $$aMal, Ajit
000015517 24500 $$aSemi-analytical modeling of substrate loss of miniature resonators

000015517 24630 $$n24.$$p24th International Congress of Theoretical and Applied Mechanics - Book of Papers
000015517 260__ $$bInternational Union of Theoretical and Applied Mechanics, 2016
000015517 506__ $$arestricted
000015517 520__ $$2eng$$aIn this paper, a new semi-analytical technique for estimating the energy loss in a miniature resonator mounted on a substrate is presented. Recent high quality factor resonators typically have resonant frequencies up to several hundred kilohertz, and therefore, the substrate is best treated as a plate. The only traveling waves in a plate are Lamb waves, which leads to a simplified characterization of the energy carried away from a vibrating source on the plate surface. In the presented approach, absorbing boundary elements of standard finite element (FE) models are replaced with the analytical expressions for Lamb waves. The method of stitching together the FE model and analytical expressions is extended to include modal analysis in order to determine quality factors of the resonator modes. The semianalytical approach is demonstrated for a cantilever bonded to a plate, and eigenmode parameters are determined. Good agreement with conventional FE simulations is shown.

000015517 540__ $$aText je chráněný podle autorského zákona č. 121/2000 Sb.
000015517 653__ $$a

000015517 7112_ $$a24th International Congress of Theoretical and Applied Mechanics$$cMontreal (CA)$$d2016-08-21 / 2016-08-26$$gICTAM2016
000015517 720__ $$aMal, Ajit
000015517 8560_ $$ffischerc@itam.cas.cz
000015517 8564_ $$s123549$$uhttps://invenio.itam.cas.cz/record/15517/files/TS.SM16-3.03.pdf$$yOriginal version of the author's contribution as presented on CD,  page 2989, code TS.SM16-3.03
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000015517 962__ $$r13812
000015517 980__ $$aPAPER