000001792 001__ 1792
000001792 005__ 20141118153454.0
000001792 04107 $$acze
000001792 046__ $$k2010-05-10
000001792 100__ $$aKuběna, I.
000001792 24500 $$aNanocompression of oriented pillars from Al thin film

000001792 24630 $$n16$$pEngineering Mechanics 2010
000001792 260__ $$bInstitute of Thermomechanics AS CR, v.v.i., Prague
000001792 506__ $$arestricted
000001792 520__ $$2eng$$aIn this paper, a new method of measurement of mechanical properties of thin films is presented. This method combines specimen preparation by focused ion beam (FIB) and compression test using nanoindentation device. Compression specimens were prepared from thin film, Al-1.5%Cu, which is commonly used in integrated circuit. Cylindrical specimens were prepared by FIB milling. The height of specimens (pillars) was about 2 μm (equal to the film thickness) and their diameter was about 1.3 μm. The pillars are single crystalline, therefore the results depend on crystallographic orientation of pillar, which was specified by EBSD (electron backscatter diffraction). Stress-strain curves of the thin film were obtained in two representations, σ−ε and τ−γ.

000001792 540__ $$aText je chráněný podle autorského zákona č. 121/2000 Sb.
000001792 653__ $$a

000001792 7112_ $$aEngineering Mechanics 2010$$cSvratka (CZ)$$d2010-05-10 / 2010-05-13$$gEM2010
000001792 720__ $$aKuběna, I.$$iKruml, T.
000001792 8560_ $$ffischerc@itam.cas.cz
000001792 8564_ $$s563717$$uhttps://invenio.itam.cas.cz/record/1792/files/Kubena-012-PT.pdf$$y
             Original version of the author's contribution as presented on CD, SOL.
            
000001792 962__ $$r1750
000001792 980__ $$aPAPER