USING COSMOS FLOWORKS TO DESIGN THE DIFFERENTIALLY PUMPED CHAMBER
Abstract eng: Environmental scanning electron microscope creates new possibilities in the field of examination various types of specimens and their phases. The article analyses and compares the results of air pumping measurement for selected shapes of the differentially pumped chamber to create vacuum, using the Cosmos FloWorks system.
Contributors:
Publisher:
Institute of Thermomechanics AS CR, v.v.i., Brno
Conference Title:
Conference Title:
Engineering Mechanics 2008
Conference Venue:
Svratka (CZ)
Conference Dates:
2008-05-12 / 2008-05-15
Rights:
Text je chráněný podle autorského zákona č. 121/2000 Sb.
Record appears in:
Record created 2014-11-13, last modified 2014-11-18
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