000004666 001__ 4666
000004666 005__ 20141119144543.0
000004666 04107 $$aeng
000004666 046__ $$k2002-06-02
000004666 100__ $$aKilani, Mohammad I.
000004666 24500 $$aDESIGN AND ANALYSIS OF A POLYSILICON SURFACE MICROMACHINED VISCOUS DRAG SPIRAL PUMP

000004666 24630 $$n15.$$pProceedings of the 15th ASCE Engineering Mechanics Division Conference
000004666 260__ $$bColumbia University in the City of New York
000004666 506__ $$arestricted
000004666 520__ $$2eng$$aThe paper introduces a new viscous micropump targeting the surface micromachining technology. The pump works by rotating a disk with a spiral protrusion at a close proximity over a stationary plate. Fluid contained in the spiral channel created by this geometry is subject to a net tangential viscous stress, and a positive pressure gradient is established in the flow direction. The paper describes the implementation of this concept in five levels of polysilicon using the standard surface micromachining technology SUMMiT, illustrating the power transmission mechanism and the mask layouts used in producing the rotating spiral channel. For the purpose of flow field analysis, an approximation is employed that neglects the curvature of the spiral channel and replaces it by an equivalent straight channel. The conditions under which this approximation is justifiable are discussed and a mapping relating the spiral channel model to the straight channel representations is developed. The straight channel representation is further simplified using symmetry into the 2D flow in the mid-axial plane. Analytical solution of this model at the lubrication limit relates the flow rate, torque and power consumption in the spiral pump to the pressure head and rotation rate through simple formulas.

000004666 540__ $$aText je chráněný podle autorského zákona č. 121/2000 Sb.
000004666 653__ $$aMicropumps, Surface micromachining, spiral pump, viscous drag.

000004666 7112_ $$a15th ASCE Engineering Mechanics Division Conference$$cNew York (US)$$d2002-06-02 / 2002-06-05$$gEM2002
000004666 720__ $$aKilani, Mohammad I.$$iGalambos, Paul C.$$iHaik, Yousef S.$$iChen, Ching-Jen
000004666 8560_ $$ffischerc@itam.cas.cz
000004666 8564_ $$s446030$$uhttps://invenio.itam.cas.cz/record/4666/files/134.pdf$$yOriginal version of the author's contribution as presented on CD, .
000004666 962__ $$r4594
000004666 980__ $$aPAPER