000009296 001__ 9296
000009296 005__ 20141204092426.0
000009296 04107 $$aeng
000009296 046__ $$k12/05/2014
000009296 100__ $$aTruhlář, M.
000009296 24500 $$aDetermination of mechanical properties from microcompression test

000009296 24630 $$n18.$$pEngineering Mechanics 2012
000009296 260__ $$bInstitute of Theoretical and Applied Mechanics, AS CR, Prague
000009296 506__ $$arestricted
000009296 520__ $$2eng$$aThis paper describes a microcompression test of thin Al - 1.5 wt. % Cu thin film deposited on Si substrate. Microcompression combines the sample preparation with the use of ion focused beam (FIB) with a compression test carried out using nanoindenter. Cylindrical specimens (pillars) were prepared using FIB. The diameter of pillars was about 1.3 µm and their height was about 2 µm (equal to the film thickness). Stress-strain curves of the thin film were obtained. The results depend on crystallographic orientation of pillar. The paper is focused to an attempt to determine as precisely as possible Young modulus of the film using experimental data and finite element modelling.

000009296 540__ $$aText je chráněný podle autorského zákona č. 121/2000 Sb.
000009296 653__ $$amicrocompression, thin film properties, focused ion beam, Young modulus, FEM modelling

000009296 7112_ $$aEngineering Mechanics 2012$$cSvratka (CZ)$$d12/05/2014 - 15/05/2014$$gEM2012
000009296 720__ $$aTruhlář, M.$$iKruml, T.$$iKuběna, I.$$iPetráčková, K.$$iNáhlík, L.
000009296 8560_ $$ffischerc@itam.cas.cz
000009296 8564_ $$s449431$$uhttps://invenio.itam.cas.cz/record/9296/files/299_Truhlar_M-FT.pdf$$yOriginal version of the author's contribution as presented on CD, paper (No. 299).
000009296 962__ $$r8924
000009296 980__ $$aPAPER