Scalable Methods of Quality Factor Determination for Resonators Attached to a Half-Space

Abstract eng:
Electromechanical resonators and filters, such as quartz, ceramic, and surface-acoustic wave devices, are important signal-processing elements in communication and sensing systems. There has been substantial progress in developing new miniaturized electromechanical resonators using micro fabrication processes (MEMS devices). These include thin-film bulk acoustic resonators (FBARs), as well as electrostatically driven and sensed lateral bending- and bulk-mode microresonators. These devices can be used both as frequency references in sensor node transceivers and as the sensing elements themselves. Resonator-based sensors have also long been recognized as an attractive approach to high-performance, low-power sensing of both physical and chemical signals. Arrays of coupled or isolated resonators are also advantageous for many signal processing and sensing applications. Experimental demonstrations of resonant quality factors, Q’s, over 10,000 at GHz frequencies coupled to excellent thermal and aging stability, give promise that resonant micromechanical devices will be a strong and vital part of a number of future wireless communication sub-systems, from cellular handsets, to PDA’s, to low-power networked sensors, to ultra-sensitive radar and jam-resistant communicators. Critical to seeing the advance of this technology is the development of design tools for quality factor simulation. In prior work we have successfully coupled perfectly matched layer technology with finite element technology to accurately predict the behavior of axis- symmetric (i.e. 2D systems). However, many designs of interest are 3D in nature and our prior work involving the direct solution of Helmholtz’s equation does not scale well. Substantial efforts have gone into iterative solution methods but these have not proved effective for this problem class. In this presentation, we investigate an alternate methodology that combines the use of discontinuous Galerkin methods with explicit time stepping to ascertain resonator quality factors. In this context we utilize HO-ABCs in the Hagstrom- Warburton form in conjunction with harmonic inversion for signal processing. In addition to presenting the theoretical under-pinnings of the analysis sequence, we also present idealized test cases with attention paid to error analysis of the results.

• Export as: BibTeX | MARC | MARCXML | DC | EndNote | NLM | RefWorks
• Add to your basket