Analysis of thermal noise in frequency-modulated gyroscopes

Abstract eng:
Thermal noise in microgyroscope arise due to molecular agitation inside beam springs, suspended mass and the surrounding environment. It is one of the fundamental limits to the precision of micro-electro mechanical system (MEMS). Previously research has been done on thermal noise for amplitude modulated Inicrogyroscope. This paper presents analysis of thermal noise for frequency modulation Inicro gyroscope. The Inicro gyroscope is comprised of a cantilever beam with a proof mass at its free end coupled electrostatically with two fixed electrodes. The Inicrogyroscope undergoes coupled flexural vibrations in two orthogonal directions when subjected to base rotation around the beam’s longitudinal axis. The rotation rate is measured by detecting the shift in the natural frequencies of two closely spaced global vibration modes. We investigate the effect of thermal noise on the natural frequency of the microgyroscope. We analyzed analytical expressions for the effect of thermal noise on the frequency modulation Inicrogyroscope and compare the output signals due to both the rotation rate and thermal n01se.

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