Size-dependent nonlinear behavior for electrostatic actuated NEMS with Casimir force

Abstract eng:
A size-dependent model for the electrostatically actuated Nano-Electro-Mechanical Systems (NEMS) is presented with Casimir force. Based on strain gradient elasticity theory and Hamilton principle, the governing equation and boundary conditions are derived. The numerical solution is obtained with help of Generalized differential quadrature method and pesudo-arclength algorithm. The results reveal that the pull-in voltage of system is reduced by Casimir force, So it is important for design to make a study of the effect of Casimir force on NEMS.

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