Uncertainty quantification for a class of vibratory MEMS gyroscopes

Abstract eng:
Uncertainty quantification for mass-spring type MEMS gyroscope due to frequency mismatch as well as quality factor are investigated via Monte Carlo simulation methods. A suitable two-degree of freedom dynamic model has been employed for this purpose. A systematic approach based on the dynamic response statistics have been developed for this class of gyroscopes. It is envisaged that the predictions made from the output response statistics and uncertainty quantification analyses of the present study can lead to significant performance improvements in the design of this class of micro-machined mass-spring type vibrating angular rate sensors.

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