Micro-speckle/grating by FIB deposition and their application to deformation measurement (INVITED)

Abstract eng:
Deformation carriers-speckle and grating are essential components for deformation measurement using the digital image correlation (DIC) and moiré techniques. In order to promote the application of DIC and moiré techniques in microdeformation measurement, new techniques for fabricating the micro-speckle/grating are in urgent need. In this study, with aid of the FIB-EB dual beam system, a novel micro-speckle/grating fabrication technique with FIB deposition was proposed. The speckle or grating structures can be generated by the gas-assisted deposition in the dual beam system. The successful results verify that the technique is feasible and can be used for micro-speckle or grating fabrication, and the minimum feature size can reach submicron level. From the results of this study, we can find that this technique owns several advantages, such as accurate positioning, adjustable view filed and carrier pattern, good adaptability for different surface, no damage on the specimen surface.

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