Self-excited microcantilevers for sensing applications

Abstract eng:
In the measurement procedure of vibrating-type sensing systems, the frequency response curve under external or forced excitation has been conventionally used. For instance, viscosity measurement and mass sensing are preformed from the estimation of difference in the Q-value related to the resonance amplitude and of shift in the resonance frequency, respectively. However, in the high viscosity range, it is very difficult to accurately measure these values. To overcome such difficulties, we propose the utilization of self-excited oscillation without relying on the frequency response curve; the positive velocity feedback is applied to compensate the damping force and to produce the self-excited oscillation. In the presentation, we introduce some measurement systems using self-excited microcantilevers as ultra-sensitive mass sensor, viscometer for high viscosity sensing, and AFM.

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