Tailoring nonlinear dynamics of microbeam resonators with electrostatic actuation

Abstract eng:
We have developed an efficient shape optimization procedure for tailoring the nonlinear dynamic performance of microbeam resonators with electrostatic excitation. By relatively simple modifications of the cross-sectional dimensions along the length of the beam we demonstrate a considerable degree of control over the characteristic cubic nonlinear coefficient, allowing e.g. for extending the linear range of operation for resonant MEMS devices, which is important for improving signal-to-noise and other performance metrics.

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