Uncertainty quantification and robustness issues in planar nonlinear resonant structures

Abstract eng:
Nonlinear resonators employing 1:2 internal resonance have been proposed as sensing elements in some Micro-Electro Mechanical Systems (MEMS). A critical aspect of their performance is their robustness of performance with respect to variations resulting from fabrication uncertainties. In this study, an uncertainty quantification analysis is performed on several candidate designs for 1:2 internal resonances obtained via a computational synthesis method, and the interplay of geometric fabrication errors and robustness is illustrated.

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