Coupling of Mechanical and Optical Methods for Simulations and Measurements

Abstract eng:
In order to investigate and analyse the dynamical-optical behavior of high precision optical systems like lithographic objectives and astronomical telescopes with low computational cost, integrated modeling methods and strategies are proposed. During an astronomical observation, even small mechanical vibrations can be sufficient to produce aberrated images. The mechanical behavior of such optical systems can be described by a combination of rigid body motion and small deformations. This leads to the utilization of elastic multibody approaches and model order reduction methods in combination with techniques from optical simulations. As a result, the exposed image influenced by mechanical excitations and structural deformations can be simulated and assessed.

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