Multiphysics analysis and design of an air-coupled pzt-based pmut

Abstract eng:
The paper deals with simulation issues that can be raised during the design process of a piezoelectric micromachined ultrasound transducer (PMUT). The presence of multiple interactions between electric, mechanical and acoustic fields is accounted for by a multiphysics computational model, which is adopted in order to carry out parametric analyses and design-of-experiments with the main objective of optimizing the device performances. The complexity of the model is increased by the possible presence of large deformation, which are treated in the framework of geometric non-linear analysis.

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