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The Institute of Theoretical and Applied Mechanics 1 records found  Search took 0.03 seconds. 
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Feasibility Study of Active Micro-Vibration Control System Using Piezoelectric Actuators for Floor Structure of Precision Manufacturing Facilities
Hora, Hirokazu ; Shimazaki, Mamoru
As the semiconductor processing technology keeps evolving, the demand for vibration-free environment of semiconductor manufacturing facilities keeps becoming severe. We d [...]
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1 Noguchi, Yuhei
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