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Original version of the author's contribution as presented on CD, Paper ID: 05-06-0027.:
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Feasibility Study of Active Micro-Vibration Control System Using Piezoelectric Actuators for Floor Structure of Precision Manufacturing Facilities
Hora, Hirokazu
;
Shimazaki, Mamoru
As the semiconductor processing technology keeps evolving, the demand for vibration-free environment of semiconductor manufacturing facilities keeps becoming severe. We d [...]
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