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> Search Results: Kilani, Mohammad I.
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The Institute of Theoretical and Applied Mechanics
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Original version of the author's contribution as presented on CD, .:
PDF
DESIGN AND ANALYSIS OF A POLYSILICON SURFACE MICROMACHINED VISCOUS DRAG SPIRAL PUMP
Kilani, Mohammad I.
;
Chen, Ching-Jen
The paper introduces a new viscous micropump targeting the surface micromachining technology. The pump works by rotating a disk with a spiral protrusion at a close proxim [...]
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