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Original version of the author's contribution as presented on CD, page 2642, code TS.SM12-4.03 .:
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On-chip testing device for the micromechanical characterization of polysilicon films
Mirzazadeh, Ramin
Due to an increasing miniaturization demand, the characteristic size of moving parts of MEMS devices may become comparable to the material length-scale, i.e. to the avera [...]
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