Active-Passive Seismic Isolation System for Monocrystal Pullers

Abstract eng:
This paper describes a seismic isolation system for monocrystal pullers. In a monocrystal puller, a monocrystal is suspended by a wire through an extremely narrow neck, and it grows longitudinally. The neck is easily broken due to the collision between the monocrystal and the wall of the puller; moreover, the regular growth of the monocrystal is stunted even during weak earthquakes. Currently, passive isolation devices are used for preventing equipment malfunctions due to earthquakes. However, in the case of the monocrystal puller, the monocrystal and wire form a pendulum with a considerably long time period. Passive isolation systems cannot sufficiently reduce the response of the pendulum to earthquakes because they may cause the pendulum to resonate. Therefore, an active isolation system is required. In this study, such a system using an AC servomotor was developed. Through shake table tests, it was demonstrated that this system could effectively reduce the displacement of the monocrystal model.

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