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Original version of the author's contribution as presented on CD, Paper ID: 12-01-0212.:
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Active-Passive Seismic Isolation System for Monocrystal Pullers
Furukawa, Hironori
;
Misoka, Hideaki
This paper describes a seismic isolation system for monocrystal pullers. In a monocrystal puller, a monocrystal is suspended by a wire through an extremely narrow neck, a [...]
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