Seismic Retrofit of Microelectronics Factories Using Viscous Dampers

Abstract eng:
The implementation of viscous dampers to microelectronics factories has been previously proved not to affect the micro-vibration of the factories in operation such that the vibration-sensitive manufacturing process will not be interfered. Therefore, a seismic retrofit strategy which employs the viscous dampers installed in between the exterior and interior structures of the “fab” structure (microchip fabrication facilities are often referred to as "fabs" in micro-electronics industry) is proposed in the study. The design formulas corresponding to the proposed retrofit method is derived using the non-classical damping theory. Based on the study, it is found that the added damping ratio to the fab structure depends greatly on the frequency ratio of the two structures in addition to the damping coefficients of the added dampers. Outside the band width of the frequency ratio in which the added damping ratio is very sensitive to the variation of the frequency ratio, the added damping ratio can be well captured using the classical damping theory.

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