Strange attractors observed in electrostatic MEMS actuators
Abstract eng: We present an electrostatic IVIEMS actuator exhibiting superharrnonic resonances as well as chaotic behaviour in soft vacuum, 500 mTorr. The displacement and velocity of the electrostatic actuator are measured with a laser vibrometer. These responses are analysed and presented in the time and frequency domains.
Publisher:
International Union of Theoretical and Applied Mechanics, 2016
Conference Title:
Conference Title:
24th International Congress of Theoretical and Applied Mechanics
Conference Venue:
Montreal (CA)
Conference Dates:
2016-08-21 / 2016-08-26
Rights:
Text je chráněný podle autorského zákona č. 121/2000 Sb.
Record appears in:
Record created 2016-11-15, last modified 2016-11-15
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