Multistability of a cantilever MEMS/NEMS capacitive switch model

Abstract eng:
In order to fully understand nonlinear dynamics of cantilever beam micro- and nanoelectromechanical capacitive switches, thorough knowledge of static behavior is vital. Presented herein is the analysis for equilibrium positions of a generalization of such devices. The representative system model employs multiphysics features based on Euler-Bernoulli beam theory, parallel plate capacitance for electrostatics, and a form of surface interaction with both attractive and repulsive regions. The geometry, material properties, and surface features of a device are condensed into just a few dimensionless quantities, creating a parameter space of low enough dimensionality to provide accessible representations of all system equilibria within physically relevant ranges. The results offer insight into the breadth of obtainable multistability as well as sensitivity to parametric uncertainty, which is crucial for informing studies on switching dynamics and various device performance metrics.

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