Pull-in and nonlinear dynamic behavior of torsional microresonators

Abstract eng:
Torsional microresonators find application in a number of microdevices, including gyroscopes and resonant accelerometers [l], magnetometers, mass detection devices and micro-mirrors. The study of torsional resonators, also in the nonlinear regime, is therefore needed in order to properly design and test such devices. Here a static characterization of the resonator is shown together with a study of the non-linear dynamic behavior. Two analytical approximations (III and V order) of the dynamic frequency response of the torsional resonators are compared to the numerical solution of the full dynamic model and a limit domain is found in the bias voltage - actuation voltage plane.

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