Electrostatic versus Electromagnetic Micromirror Actuation
Abstract eng: This paper compares the performance of electrostatically actuated and electromagnetically actuated micromirrors. The static and dynamic characterization of both types of micromirrors is carried out. We find that micromirrors actuated electromagnetically via a Lorentz force can realize much larger (20 times more) torsion angles than electrostatically actuated micromirrors for the same mirror structure.
Publisher:
International Union of Theoretical and Applied Mechanics, 2016
Conference Title:
Conference Title:
24th International Congress of Theoretical and Applied Mechanics
Conference Venue:
Montreal (CA)
Conference Dates:
2016-08-21 / 2016-08-26
Rights:
Text je chráněný podle autorského zákona č. 121/2000 Sb.
Record appears in:
Record created 2016-11-15, last modified 2016-11-15
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