The Institute of Theoretical and Applied Mechanics 2 records found  Search took 0.06 seconds. 
1.
Whether smart structures can be applied to large-scale structures on the earth or not, depends on performances and costs of actuators. Therefore, it is suitable that piez [...]
2.
As the semiconductor processing technology keeps evolving, the demand for vibration-free environment of semiconductor manufacturing facilities keeps becoming severe. We d [...]

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1 Shimazaki, Mamoru
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